@Article{LealFragRasiMass:2017:ImHiN2,
author = "Leal, Gabriela and Fraga, Mariana Amorim and Rasia, L. A. and
Massi, M.",
affiliation = "{Universidade Federal de S{\~a}o Paulo (UNIFESP)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Universidade Regional
do Nordeste do Estado do Rio Grande do Sul} and {Universidade
Federal de S{\~a}o Paulo (UNIFESP)}",
title = "Impact of high N2 flow ratio on the chemical and morphological
characteristics of sputtered N-DLC films",
journal = "Surface and Interface Analysis",
year = "2017",
volume = "49",
number = "2",
pages = "99--106",
month = "Feb.",
keywords = "chemical bonding, diamond-like carbon, magnetron sputtering,
morphology, nitrogen incorporation.",
abstract = "Because of their outstanding characteristics, diamond-like carbon
(DLC) thin films have been recognized as interesting materials for
a variety of applications. For this reason, the effects of the
incorporation of different elements on their fundamental
properties have been the focus of many studies. In this work,
nitrogen-incorporated DLC films were deposited on Si (100)
substrates by DC magnetron sputtering of a graphite target under a
variable N2 gas flow rate in CH4 + N2 + Ar gas mixtures. The
influence of high N2 flow ratios (20, 40 and 60%) on the chemical,
structural and morphological properties of N-DLC films was
investigated. Different techniques including field emission
gun-equipped scanning electron microscope (FEG-SEM),
energy-dispersive X-ray spectroscopy (EDS), atomic force
microscopy (AFM), profilometry, Rutherford backscattering
spectrometry (RBS) and Raman spectroscopy (325-nm and 514-nm
excitation) were used to examine the properties of the N-DLC
films. Thus, the incorporation of nitrogen was correlated with the
morphology, roughness, thickness, structure and chemical bonding
of the films. Overall, the results obtained indicate that the
fundamental properties of N-DLC films are not only related to the
nitrogen content in the film but also to the type of chemical
bonds formed.",
doi = "10.1002/sia.6064",
url = "http://dx.doi.org/10.1002/sia.6064",
issn = "0142-2421",
language = "en",
targetfile = "leal_impact.pdf",
urlaccessdate = "27 abr. 2024"
}